Description
The Bruker TriboLab CMP Process and Material Characterization System is a compact benchtop tool engineered to accurately replicate full-scale wafer polishing conditions without any downtime on production equipment. It offers exceptional ROI by enabling testing on small samples instead of full wafers, reducing operational costs while accelerating materials development and process refinement.
The system features flexible CMP parameter control to support tailored experimentation with high accuracy and repeatability. Its on-board diagnostics provide unmatched visibility into transient polishing behavior by capturing detailed data from initial pad contact through the entire test. This enables informed, early-stage process development decisions.
TriboLab CMP supports a wide range of sample types, materials, slurries, pads, and conditioning discs. It accommodates small coupons through full 100 mm wafers and provides multiple mounting configurations for enhanced flexibility. Backed by Bruker’s extensive expertise and global install base, users benefit from strong applications support and guidance.
TriboLab CMP — Summary Table
| Category | Key Details |
|---|---|
| Primary Benefit | High ROI benchtop CMP system that replicates full-scale wafer polishing without production downtime |
| Purpose | CMP process and material characterization for R&D and early-stage development |
| Cost Savings | Allows testing on small coupons, significantly reducing cost compared to full-wafer tests |
| Repeatability & Detail | Delivers highly repeatable, detailed polishing process measurements |
| On-Board Diagnostics | Provides full visibility into transient polishing behavior from first pad contact through the test duration |
| Data Insight | Enables early process decisions with complete, high-resolution diagnostic data |
| Parameter Control | Highly flexible CMP parameter control for tailored testing and optimization |
| Sample & Material Flexibility | Compatible with any flat material, slurry, pad, and conditioning disc |
| Sample Size Range | Supports small coupons up to full 100 mm wafers |
| Mounting Options | Multiple sample mounting configurations available for different testing needs |
| Applications Expertise | Backed by Bruker’s global install base and expert applications support |
| Ideal Users | CMP researchers, process engineers, semiconductor R&D teams, material scientists |
