Cryo SAS Cryogenic Silicon Analyzer

Cryo SAS Cryogenic Silicon Analyzer

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CryoSAS combines Bruker’s high performance FT-IR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.

Categories: Gas Analysis, Infrared & Near Infrared

Description

1. System Overview

Category Details
Product Name CryoSAS – Cryogenic Silicon Analysis System
Purpose Low-temperature impurity analysis of silicon
Operating Temperature < 15 K
Environment Industrial, high-throughput semiconductor production
Spectrometer Type Bruker FT-IR integrated system

2. Key Performance Features

Feature Details
Shallow Impurity Detection Boron, Phosphorus → low ppta levels (ASTM/SEMI MF1630)
Carbon & Oxygen Detection Low ppba levels (ASTM/SEMI MF1391)
Spectral Range 1500–280 cm⁻¹ (optimized for impurity detection)
Detection Limits (typ.) Phosphorus: 10 ppta
Boron: 30 ppta
Carbon: 20 ppba
Sample Type Single crystal silicon, ~3 mm wedged samples
Reporting Automated analysis & results reporting

3. Cooling & Vacuum System

Component Details
Cooling System Built-in closed-cycle cryo-cooler (no liquid helium required)
Cost Savings ~€50,000 per year vs. liquid helium systems
Vacuum System Turbodrag pump + dry fore pump
Control Fully automated PLC-controlled vacuum & cooling

4. Sample Handling & Hardware Design

Feature Details
Sample Chamber Stainless-steel, large access area
Sample Holder Automated 9-position holder
Material Gold-coated OFHC copper for uniform cooling
Positioning Precision stepper motor, high torque, durable translation stage

5. Software & Ease of Use

Category Details
User Interface Touch-screen, industrial QC-focused
Automation Cooling, measurement, evaluation, reporting
User Skill Requirement No spectroscopy or vacuum expertise needed
Workflow Select method → enter sample info → press start → automatic processing

6. Industrial Benefits

Benefit Details
High Throughput Automated multi-sample handling
Reliability Proven hardware, stable cryogenic operation
Low Operating Cost No liquid helium; minimal maintenance
Consistent Results Optimized for repetitive QC workflows

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