MGA Series

CryoSAS combines Bruker’s high performance FT-IR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.

The MGA Control software provides users with all necessary functions and controls to perform highest precision and accuracy gas mixing ratio measurements with MIRO’s MGAs. It offers an easy-to-use touch screen interface that gets new users up and running in no time thanks to a high degree of automation, while experienced users have full insight and control over the spectral fitting of the measured gas absorptions.

The MATRIX II-MG Series comprises four high-performance FT-IR gas analyzers in a compact and rugged housing. They are designed for the automated, high precision and real-time monitoring of gas concentrations in many different applications. Whatever application you have in mind, you can configure the system to your needs:

A variety of different detector types are available for your needs: detectors with exceptional sensitivity (liquid-nitrogen- or Stirling-cooled MCT), detectors with extended spectral range (DLaTGS) or detectors when liquid nitrogen is unavailable but low detection limits are yet required (TE-MCT).

The OMEGA 5 is designed for automated, high-precision, and real-time monitoring of gas concentrations across various applications. Enclosed in a 19’’ rackmount housing, it features a 5-meter multi-reflection gas cell that can be heated to 191 °C. The system is equipped with a TE-MCT detector for low detection limits and continuous measurements as liquid nitrogen is not required.

The OMEGA 5 is operated by the gas analysis software OPUS GA. This software enables the quantification of over 350 compounds without the need for calibration measurements. For an accurate quantification, the pressure and temperature of the gas are constantly recorded throughout the analysis process and taken into account.

The high-resolution option provides the capability to measure with a spectral resolution of better than 1 cm^-1 (standard: better than 2 cm^-1). This enhanced spectral resolution proves invaluable in numerous applications, enabling the identification and quantification of gas compounds, even within complex gas mixtures with a significant degree of overlapping infrared signals.